Lithography, etch, deposition, thermal, implant, wet, metrology and back-end tools for 50–200 mm work, inspected and graded before they ship.
This is the catalogue of used semiconductor equipment we buy, refurbish, service and install. The tools are grouped by process area, so you can start from the step you need to add or replace: patterning, films and doping, or cleaning, measurement and packaging. Each category page explains the tool families in it and what we check on inspection, then lists the platforms we know well.
Most of these tools were built for single-wafer research, teaching or pilot-line work at 50–200 mm. That is deliberate. A university cleanroom or a small fab rarely needs a high-volume production tool; it needs a platform that is well documented, still has a parts supply and fits the facilities you already have.
Every machine page names the manufacturer, model and typical configuration, the services that apply and the upgrades usually considered for that platform. When a specific tool is offered for sale, it carries one of four condition grades: Certified, Refurbished, Inspected or As-is. What each grade means, and what the report contains, is set out in how we inspect.
If you are comparing platforms, start with a category such as lithography or etch. If you already know the model, request a quote with your wafer size and facilities, and we will tell you what we can source and in which condition.
Covers lithography and etch.
Mask aligners, laser writers, i-line steppers and spin coaters for research cleanrooms and pilot lines, inspected and serviced by our own engineers.
Mask aligners · Laser lithography systems · i-line wafer steppers · Spin coaters and bake plates
Used RIE, ICP and deep silicon etchers, production etch platforms and plasma ashers, refurbished and serviced for cleanrooms that run many materials on few tools.
RIE systems · ICP-RIE systems · Deep reactive ion etchers · Production etch platforms · Plasma ashers
Covers deposition, thermal processing and ion implantation.
Refurbished sputter systems, e-beam evaporators, ALD and PECVD tools and 200 mm cluster platforms, rebuilt and serviced for research labs and pilot lines.
Sputter systems · Electron-beam evaporators · PECVD systems · Thermal ALD systems · CVD and etch cluster platforms
Used horizontal and vertical diffusion furnaces, LPCVD tubes and rapid thermal processors, refurbished and serviced for oxidation, doping, anneal and nitride work.
Horizontal diffusion furnaces · LPCVD furnaces · Vertical batch furnaces · Rapid thermal processors
Medium-current and research ion implanters for doping in pilot lines and university labs, with inspection, refurbishment, decontamination and service support.
Medium-current implanters · Research implanters · Ion sources and gas boxes
Covers wet processing & CMP, metrology & inspection and back-end & packaging.
Spin rinse dryers, single-wafer spray processors, CMP systems and lapping machines, refurbished and serviced for cleaning, stripping and planarisation.
Spin rinse dryers · Single-wafer spray processors · CMP systems · Lapping and polishing systems
Ellipsometers, reflectometers, stylus profilers, four-point probes and SEMs, refurbished and calibrated so the numbers your process depends on can be trusted.
Spectroscopic ellipsometers · Film thickness reflectometers · Stylus profilers · Four-point probe mappers · Scanning electron microscopes
Refurbished back-end and packaging tools for prototypes and small series, from dicing saws and wire bonders to die, flip-chip and wafer bonders.
Dicing saws · Wedge and ball wire bonders · Die and flip-chip bonders · Wafer bonders
Tell us the process, wafer size and facilities. We shortlist tools that fit and send an inspection report with every offer.