How we inspect and grade used equipment
Every tool we sell is powered up where it is safe to do so, checked against its original specification and given one of four condition grades, backed by a written report.
Why inspection comes before the offer
A used process tool can look complete and still be missing the parts that matter: a dead RF generator, a leaking chamber, a controller that will not boot. We inspect before we make an offer so that the grade, the price and the lead time in your quote describe the tool you will actually receive. The inspection also tells us which refurbishment work is worth doing and which would cost more than it returns.
The four condition grades
Every tool we list carries one of four grades. We use exactly these words, and they mean exactly this:
| Grade | What it means |
|---|---|
| Certified | Refurbished and run on a test process; results are in the report. |
| Refurbished | Worn parts replaced, cleaned and recalibrated to the original specification. |
| Inspected | Powered up and checked against the original specification; sold with the report. |
| As-is | Not powered up; sold with photos and the known service history. |
The grade describes the state of the tool when it leaves us. If you order refurbishment or upgrades on an Inspected tool, the grade changes when the work is done and the report is updated.
What we check on a used tool
The checks depend on the tool type, but most inspections cover the same systems. We test against the manufacturer's original specification for that configuration, using the tool's own documentation where it exists.
Power, controls and safety
- Power-up sequence, controller boot and software version
- Emergency stops, door and lid interlocks, gas and vacuum interlocks
- Error logs and alarm history, where the controller stores them
Vacuum and gas handling
- Base pressure and rate of rise on each chamber
- Helium leak check of the chamber and foreline where the tool needs one
- Pump condition: running hours, noise, oil condition on oil-sealed pumps
- Gas lines, valves and mass flow controllers, flowed and checked for response
Vacuum faults are the most common reason a used tool fails to reach its original performance. When the inspection finds a high leak rate, a contaminated chamber or worn pumps, we quote the repair under vacuum system refurbishment rather than leaving it for you to discover after installation.
Process hardware
- RF and DC generators, matching networks and their reflected power
- Heaters, chucks and temperature control
- Wafer handling: robots, cassette stations, stages and alignment
- Light sources and optics on lithography tools; detectors and sources on metrology tools
Documentation and history
- Nameplate, configuration and installed options
- Manuals, drawings and service records that come with the tool
- Process history, including any toxic or corrosive chemistries used
What the inspection report contains
You get a written report for every Inspected, Refurbished and Certified tool. It includes:
- Photos of the tool, its chambers, electronics racks and nameplates
- The configuration as found, with installed options and software version
- Each test performed, the measured value and the specification it was checked against
- Faults and deviations, each marked as fixed, to be fixed in the quoted scope, or left as found
- Parts that are missing, worn or near end of life
- The facilities the tool needs at your site
For Certified tools the report also contains the test process results, for example etch rate and uniformity on a test wafer, film thickness and uniformity, or exposure and alignment results on an aligner. The test process and its acceptance limits are agreed with you before we run it. Our test and certification service describes this step in more detail.
Choosing a grade
The right grade depends on your team and your schedule. If you have experienced in-house engineers and time, an Inspected tool gives you a known starting point at lower cost. If the tool must run a process soon after installation, Certified removes most of the uncertainty. Our guide on used vs refurbished vs new equipment walks through the trade-offs.
When you request a quote, tell us which grade you are after, or ask us to quote more than one so you can compare.
Questions and answers
Can I attend the inspection or send my own engineer?
Yes. Tell us when you request a quote and we will schedule the tests so your engineer can watch them, on site or by video call.
Why would you sell a tool as As-is?
Some tools arrive without the facilities, parts or controller needed to power them up safely. We sell those As-is with photos and the known history, so buyers who plan their own rebuild can price it themselves.
Does a higher grade mean a longer lead time?
Usually, yes. A Certified tool needs refurbishment and a test process run, so it takes longer to prepare than an Inspected tool; your quote states the expected lead time for each grade we can offer.
Can you upgrade a tool from Inspected to Refurbished after I buy it?
Yes. The inspection report lists the work needed, and we can quote that work as a refurbishment scope before or after the sale.
Looking for a specific tool?
Tell us the process, wafer size and facilities. We shortlist tools that fit and send an inspection report with every offer.