Semiconductor spare parts, searchable by part number
Used, refurbished and equivalent parts for older process tools, each listed with the machines it fits. Filter by manufacturer, part type or tool, and request a quote for the parts you need.
We are adding parts to the catalogue. Send us the part number and the tool it fits, and we will check what we can supply.
Request a quoteConditions and availability
Every quote states the condition and the test result of the part.
Condition
- Tested used
- Removed from a tool, then inspected or tested; the test record comes with the part.
- Refurbished
- Rebuilt with new wear parts and tested.
- Unused surplus
- Never installed, from surplus stock; inspected before it is offered.
- Equivalent
- A third-party or current part that fits the original function, sometimes with an adapter.
- As-is
- Not tested; sold as described, with photos.
Availability
- In stock
- Held by us and ready to ship once the quote is accepted.
- On request
- We source the part or an equivalent, then confirm condition, test result and lead time in the quote.
Used and refurbished spare parts for older tools
The catalogue is for the people who keep older semiconductor process tools running in university cleanrooms, pilot lines and small fabs: the engineer with a tool down, the lab manager building a spares list, the purchaser asked to find a board that is no longer made.
Every listing is a real part that we can supply or source, filed under the manufacturer's part number and linked to the tools it fits. How we find, inspect and test parts is explained under our spare parts service.
Searching by part number
Type the number as it appears on the label, in the manual or on an old purchase order. Dashes, dots, spaces and letter case make no difference, so the same listing comes up however the number was written down. You can also search with words from the part description, then narrow the results by manufacturer, part type or the kind of equipment the part fits.
If you start from the tool rather than the part, open its page under equipment: catalogue parts that fit it are listed there under "Parts for this tool".
From listing to quote
A listing shows the condition we offer the part in. Before you order, the quote confirms the condition and test result of the specific part. Prices are on request: ask for a quote from the listing or through the quote form.
Spare parts, controllers and their documentation can be subject to export controls on their own, whatever the age of the tool they came from. Our export compliance page explains the checks we make before a part leaves the Netherlands.
Questions and answers
How do we check that a listed part fits our tool?
Compare the part number and any revision marking on the part you are replacing, not only the tool model, because boards and assemblies can differ between configurations and production years of the same platform. If you are unsure, send photos of the label and your tool's configuration with the request, and we confirm the match before we quote.
The number on our part differs from the one in the manual. Which should we search?
Search both. Manufacturers revise and supersede part numbers, so an installed part and an older manual can disagree; where we know superseded or cross-reference numbers, the listing includes them and the search finds them.
Can we get one quote for several parts for the same tool?
Yes. Send the part numbers together with the tool model, and we quote each part as a separate line with its condition, test result and lead time, so you can order all of them or only the ones you need now. If the parts are for a repair, we can also quote fitting them on a service visit.
Can you ship parts to a lab in another country?
Yes, where export rules and sanctions allow it. Before a part leaves the Netherlands we classify it, check the destination and screen the buyer and end user. We may ask for a signed end-user statement, and if a licence is needed we tell you before you order.
Can’t find a part?
Send us the part number, the manufacturer and the tool it fits. We check what we can supply and confirm the condition, test result and lead time in the quote.