DISCO DAD3220 dicing saw
Pieces, 50 mm (2 in), 100 mm (4 in), 150 mm (6 in) · 2000s–2010s
The DAD3220 is a compact semi-automatic dicing saw for wafers and substrates up to 150 mm. We inspect, refurbish and set up used units for silicon, glass and ceramic dicing.
Price on request
Where the DAD3220 fits
The DISCO DAD3220 is a compact, semi-automatic dicing saw. It became a common choice for university labs, MEMS groups and small packaging lines that need to cut wafers into dies without the footprint of a fully automatic saw. You load a wafer or substrate on tape and frame, align the streets under the microscope and the saw cuts the programmed pattern, channel by channel.
Used DISCO DAD3220 saws are popular because they are small, well documented and straightforward for students to learn. They handle silicon, glass and ceramic substrates up to 150 mm, and with the right blades they cut sensors, photonic chips and test structures cleanly. For 200 mm frames or high-volume dicing, a larger DISCO platform is the better fit.
What we inspect on a used DAD3220
- Spindle. Run-out, noise and temperature over a run-in, air-bearing pressure and spindle cooling flow. The spindle is the most expensive part on the saw.
- Chuck table. Flatness, porous surface condition, vacuum hold-down and theta rotation.
- X axis and covers. Bellows and waterproof covers, where cutting water and slurry cause most of the wear. A torn bellows lets slurry into the drive.
- Y and Z axes. Index accuracy and Z height repeatability during blade height set-up.
- Alignment optics. Microscope, camera, illumination and the image alignment routine.
- Water system. Cutting water nozzles, flow switches and filters, and the spindle coolant circuit.
- Test cuts. We dice a test wafer and measure kerf width, chipping and straightness. The results go in the inspection report.
Refurbishment scope
A typical refurbishment replaces the X axis bellows and covers, cleans and repairs the cutting water system, renews the chuck table if its surface is worn or clogged, and replaces air and water fittings. We check the spindle under load and quote its repair or replacement separately when needed. The saw is then recalibrated for blade height and index, and run on test cuts. Grading follows our Certified, Refurbished, Inspected or As-is scale; see our refurbishment service for how we scope this work.
Upgrades and spare parts
Most upgrades are about material and process. Changing to glass or ceramic dicing means new blades, flanges and often a different feed rate and dressing routine. Better filtration on cutting water extends nozzle life and keeps the work cleaner. Bellows, chuck tables, nozzles, flanges and sensors are the usual spare parts, available through our spare parts service.
Facilities
- Mains power to the nameplate rating of the saw
- Clean dry air at the specified pressure for the air-bearing spindle; air quality matters for spindle life
- Cutting water (DI water is typical) and a drain
- Spindle cooling water or a chiller, depending on configuration
- Exhaust for mist, depending on site rules
- A tape mounter and frames, if you do not already have them
Buying advice
Check the spindle first and ask for its service history. Then confirm your largest wafer and frame size, because the DAD3220 stops at 150 mm. Plan the clean dry air supply carefully: oil or water in the spindle air is the most common cause of early spindle failure. A short operator training session on blade dressing, height set-up and recipe creation saves blades and wafers in the first months. Wire bonders and die placement tools for the diced chips are in our back-end range.
Typical configuration
- Wafer sizes
- Pieces, 50 mm (2 in), 100 mm (4 in), 150 mm (6 in)
- Configuration
- Semi-automatic, single spindle, manual wafer load
- Workpiece size
- Up to 150 mm (6 in) round or square
- Spindle
- 1.5 kW air-bearing spindle, typical configuration
- Blades
- Hub and hubless blades, up to about 58 mm diameter with the standard spindle
- Cutting range
- Typically about 160 mm on the X axis
- Alignment
- Microscope with camera and image-based alignment
Typical values for the platform. Each tool’s inspection report lists its actual configuration.
What we do for the DAD3220
Refurbishment
Rebuild used tools to their original specification, with a written scope and a test report.
Learn moreMaintenance
Keep older process tools running with planned maintenance, repair, calibration and parts.
Learn moreInstallation
Moving a process tool from one cleanroom to another, and getting it running at the new site.
Learn moreCommon upgrades
- Blade and flange set for a new material (glass, ceramic, compound semiconductors)
- Cutting water and spindle coolant filtration
- Updated wafer frames, cassettes and tape mounting accessories
- Operator training on blade dressing and cut recipes
Need a spare part for the DAD3220? Send us the part number and we will check what we can supply.
Questions and answers
Can the DAD3220 dice 200 mm wafers?
No. The DAD3220 is specified for workpieces up to 150 mm. For 200 mm wafers on frames you need a larger DISCO model.
What materials can it cut?
Silicon, glass, quartz, ceramics and many compound semiconductors, given the right blade, spindle speed and feed rate. We help you choose blades for your material before delivery.
What usually wears out on a used dicing saw?
The spindle bearings and air supply, the chuck table, the bellows and covers around the X axis, and the cutting water nozzles. We check each of these at inspection.
Do you supply blades and tape?
We can include a starter set of blades, flanges and frames matched to your material. Blades and dicing tape are consumables that you will reorder from blade and tape suppliers.
More tools in this category
FINEPLACER lambda die and flip-chip bonder
Dies and substrates · Late 2000s–2010s
Interested in the DISCO DAD3220?
Tell us the process, wafer size and facilities. We reply with availability, an inspection report and a refurbishment scope.