We tell you exactly what power, gases, water, vacuum and exhaust a tool needs, check what your contractors install, and make the tool-side connections.
On most installations, the tool spends more time waiting for facilities than being installed. Gas lines need design, approval, installation and leak testing. Exhaust needs capacity and sometimes a scrubber. Power may need a new breaker or a transformer. If any of these starts late, the tool sits in its crates. Getting the facility requirements right and early is the most effective way to shorten an installation.
Our role is to tell you exactly what the tool needs, help your facility team prepare it, and make the tool-side hook-up once the building is ready.
For each tool we write a requirements sheet with the utilities it needs at the point of use. Values are based on the actual configuration of your tool, not the full option list from the brochure. A typical sheet covers:
Before you buy, this sheet tells you whether a tool fits your cleanroom. After you buy, it is the brief for your facility contractors.
We compare the requirements with what your cleanroom already has and produce a gap list: what can be connected as is, what needs changing and what needs adding. Common findings are cooling water at the wrong temperature or pressure for an older RF generator, exhaust capacity that cannot take another tool, or a missing gas cabinet for a corrosive or toxic gas. Where an option on the tool removes a gap, for example replacing an oil-sealed pump with a dry pump to avoid an oil mist exhaust, we say so and refer to our dry pump conversion work.
Building-side lines are installed by your facility team or licensed contractors to your site standards. Once they are ready we make the tool-side connections using the labelled connection list from de-installation. We then check every utility before any power is applied to the tool:
Tool-side hook-up on a single-chamber tool usually takes one to three days once the building side is ready. Cluster tools with many gases and sub-fab pumps take longer. The building-side work depends on your contractors and approvals, and we recommend starting it as soon as the facility specification is agreed.
You receive the facility requirements sheet, the gap list, a hook-up check sheet with measured values and an updated connection drawing. With every utility checked, the tool is ready for commissioning and acceptance.
We list every utility the tool needs with sizes, pressures, flows and connection types.
We compare the list with your cleanroom and mark what your facility team has to add or change.
Your facility team or contractors install the lines to your site standards, and we answer their questions.
We connect the tool, leak check and verify every utility before power-up.
150 mm (6 in) · Mid-1990s–2000s
200 mm (8 in) · 2000s–2020s
200 mm (8 in) · 1990s–2020s
The building-side work is done by your facility team or licensed contractors to your site standards. We specify what is needed, check the result and make the connections on the tool side.
Not usually. Many tools built for North American 208 V supplies run in Europe through a step-down or isolation transformer. We size it in the facility specification. We also check 60 Hz components such as pump motors and chillers for running on 50 Hz.
We list it in the gap check with the cabinet, detection and exhaust requirements it brings. Sometimes a different chemistry or a tool option avoids the gas, and we point that out.
Yes. Send the tool model and configuration, and we send the facility requirements so your facility team can check feasibility early.
Pumps, power supplies, source count, targets and installation shape the real cost of a used sputter tool. What to put in the budget before you ask for quotes.
Tell us the tool and what you need. We scope the work and send a written offer.