Ellipsometers, reflectometers, stylus profilers, four-point probes and SEMs, refurbished and calibrated so the numbers your process depends on can be trusted.
Thickness and optical constants of thin and multilayer films, with modelling for research materials.
Fast, simple thickness measurement of common dielectric and resist films on known substrates.
Step height, etch depth, roughness and wafer bow from a diamond stylus scan.
Sheet resistance maps after implant, diffusion and metal deposition.
High-resolution imaging of features, cross-sections and defects.
300 mm (12 in) with mapping stage · 2000s–2020s
200 mm (8 in) · 1990s–2020s
200 mm (8 in) · 1990s–2000s
200 mm (8 in) · 1990s–2010s
150 mm (6 in) · 2000s–2010s
A cleanroom is only as good as its measurements. If the profiler reads ten percent low, every etch rate in your lab notebook is wrong. Used metrology equipment is good value because the mechanics often outlive the original fab, but a measurement tool is worth buying only once its accuracy has been checked against a reference.
We sell refurbished metrology and inspection tools, calibrate them against reference standards and support them after installation.
Spectroscopic ellipsometers such as the J.A. Woollam M-2000 measure how polarised light changes on reflection, over a range of wavelengths and angles. With a good optical model they give thickness and optical constants for very thin films and stacks. They are the tool of choice for materials research and ALD work.
Reflectometers like the Nanometrics NanoSpec 6100 measure reflected intensity over a spectrum. They are quick, need little training and are ideal for routine oxide, nitride and resist thickness checks. Our article ellipsometer or reflectometer compares the two in more depth.
Stylus profilers in the KLA-Tencor P-series drag a diamond stylus across the surface to measure steps, etch depths, roughness and film stress from wafer bow. They are often the most heavily used metrology tool in a teaching lab.
Four-point probe mappers such as the CDE ResMap 178 measure sheet resistance at many points across a wafer, which shows implant dose, diffusion results and metal film uniformity at a glance.
Field-emission SEMs like the Hitachi S-4800 image features, cross-sections and defects at high magnification. They are the most demanding instrument here for room conditions and service.
Refurbishing a metrology tool is mostly about the parts that age: lamps, styli, probe heads, stage drives and computers. Old acquisition PCs are a common risk, so we image working systems and move them to newer hardware where the software allows.
Calibration against reference standards is then done and documented. For buyers who need defined acceptance criteria, test and certification records performance against an agreed specification before the tool leaves us.
How often a tool needs recalibrating depends on how heavily it is used and what your quality system asks for. Many labs settle on a full check once a year, plus a quick reference measurement before critical work or after a lamp, stylus or probe head change. Keep the reference samples with the tool, log each check, and watch the trend: a slow drift points to a wearing part long before results go out of range.
Tell us what you measure and how often, and we will recommend the instrument and configuration that fits.
A reflectometer is faster and simpler for routine thickness on known films. An ellipsometer handles thinner films, multilayers and unknown optical constants, at the cost of modelling effort.
We measure reference samples with known values, such as thickness standards, step height standards or sheet resistance references, and record the results in the report.
Yes. Floor vibration, stray magnetic fields and room temperature all affect image quality, so we recommend a site survey before installation.
Software and licences vary from tool to tool. We check what is installed and transferable and list it in the inspection report.
It depends on use and your quality system, but a yearly check against references is common, with quick reference checks before critical measurements.
Reflectometers measure routine films quickly and cheaply. Ellipsometers handle very thin films, unknown materials and stacks. How to choose for your lab.
Tell us the process, wafer size and facilities. We shortlist tools that fit and send an inspection report with every offer.