Preventive maintenance, repair, calibration and spare parts for mask aligners, etchers, deposition and thermal tools that are out of OEM support or need local support.
You send the tool list, service records and current problems, and we tell you which tools we can support and how.
An engineer checks each tool on site and records its condition, wear points and open faults.
We propose intervals, a spares list and the visit pattern for each tool, and quote them per visit or per contract.
We carry out the work, write a service report for every visit and keep the tool history up to date.
Scheduled service on wear parts, with intervals set by how you actually use each tool.
Learn moreFault diagnosis and repair for down tools, with a root-cause report when the tool is running again.
Learn moreTested used, refurbished and equivalent parts for older tools, and a spares list for your site.
Learn moreChecks and adjustment of flow, pressure, temperature, RF power and exposure intensity, with recorded values.
Learn moreAn annual agreement for preventive visits, calibration, remote help and spares, priced per tool.
Learn morePhone, video and supervised remote sessions that help your staff solve faults without a site visit.
Learn moreMost university cleanrooms and small fabs run tools that are fifteen, twenty or thirty years old. They still do useful work, but the manufacturer has often stopped supporting them, the engineer who knew them has moved on, and every failure turns into weeks of downtime. Our semiconductor equipment maintenance service is built for that situation: planned work that prevents failures, methodical repair when something breaks, and a parts strategy that does not depend on a discontinued catalogue.
We maintain the same tool families we refurbish and sell: mask aligners and coaters, plasma etchers, sputter and evaporation systems, CVD and furnaces, wet benches and metrology tools. If you run a mixed fleet, one service partner for all of it usually costs less than separate arrangements per tool, and it gives you a single history for every tool in the lab.
We start from your tool list and whatever service records exist. For each tool we want to know the model, configuration, installed options, hours or cycles where they are logged, and the faults you see today. From that we tell you which tools we can support, what a first visit involves and which parts are likely to be hard to source.
The first on-site visit is a baseline. We check each tool against its original specification, record wear points and open faults, and list the parts you should keep on site. That report becomes the starting point for the maintenance plan.
Pricing depends on the number and type of tools, their condition at baseline, how often you want us on site, and which parts are part of the scope. One-off visits are quoted per visit. Recurring work can be put under a fixed annual contract. We never quote a price before we know the tool.
The two routes cover the same work; what differs is how it is planned and paid. Per-visit maintenance suits a lab with one or two older tools, a capable technician and an irregular budget: you book a preventive maintenance visit when the schedule says it is due and call us when something breaks. A contract suits a fleet where several tools carry most of the user hours. It fixes the annual cost, puts every covered tool on a calendar and folds calibration and phone help into one agreement.
A practical rule: if a tool's failure would stop a teaching course, a thesis deadline or a customer delivery, plan its maintenance rather than waiting for the fault. Tools used a few times a month can stay on per-visit terms.
Most older tools arrive with little or no record of what has been changed. Every visit we make adds to that record: the measured values, the parts fitted, the faults found and the settings changed. Gauges, flow controllers and lamp intensity are checked against calibrated reference instruments, and the calibration record lists which instrument was used. When a fault does occur, the history shortens the diagnosis, because the engineer can see what was last touched and what has drifted. It also matters later, when you upgrade, move or sell the tool and the next owner asks what has been done to it.
Some recurring faults are cheaper to remove than to keep fixing. An oil-sealed pump that contaminates a chamber, a mercury lamp that needs frequent changes, or a controller with no remaining spare boards are all candidates for an upgrade. When a maintenance visit shows that a part of the tool has reached that point, we say so in the report and quote both options, so you can decide on cost and downtime rather than habit. On a SUSS MA6, for example, repeated lamp changes and intensity drift are a common reason to compare a lamp service with a UV-LED source.
Yes. We review the model, configuration and service history first and tell you before any visit whether we can support the tool and which parts are hard to get.
Yes. Older platforms are what this service is built around. Where original parts are discontinued we look for tested used parts, refurbished assemblies or a modern equivalent, and we tell you which route we propose before we order.
Per visit for one-off work, or as a fixed annual fee under a service contract. The price depends on the number of tools, their condition, how many visits are planned and which parts you want included.
Yes. A sensible start is the tool that causes the most downtime; once its baseline and first visits are done, other tools can be added. Each tool has its own schedule and report, so adding one does not change the others.
Access to the tool and its facilities, a lockout procedure for your site, the manuals you have and someone from your team who knows the tool's recent history.
Old controllers, discontinued boards and lost manuals retire most legacy tools. How to plan spares, backups and retrofits before a failure forces it.
Reflectometers measure routine films quickly and cheaply. Ellipsometers handle very thin films, unknown materials and stacks. How to choose for your lab.
Thermal ALD gives the best conformality and the simplest tool. Plasma ALD adds lower temperatures and more materials. How to choose for a shared research lab.
Tell us the tool and what you need. We scope the work and send a written offer.