Semiconductor equipment service, refurbishment and upgrades
Refurbishment, upgrades, maintenance and installation for tools you already own or buy from us, scoped in writing before work starts.
Equipment service for older and legacy tools
We service semiconductor process equipment across four lines of work. Refurbishment brings a used tool back to its original specification. Upgrades change what the tool can do, or remove a weak point such as an obsolete controller or an oil-sealed pump. Maintenance keeps a running tool in specification. Installation covers the move itself: de-installation, crating, transport, hook-up and acceptance.
The same engineers do the inspection, the refurbishment and the installation, so what we learn about a tool in one stage carries into the next. That matters most on older platforms, where documentation is incomplete and each tool has its own history of modifications.
Where to start
If a tool is down or drifting, look at maintenance, including repair and remote support. If you are planning a purchase or a move, installation explains what we need from your facilities team and when. For a tool that runs but no longer fits your process, see upgrades.
Every job starts with a written scope. We do not start work until you have approved it.
Semiconductor equipment refurbishment for research and pilot fabs
Rebuild used tools to their original specification, with a written scope and a test report.
Chamber refurbishment
Strip, clean and rebuild the process chamber, with new seals and a leak-check record.
Learn moreVacuum system refurbishment
Overhaul pumps, valves, gauges and forelines, and document base pressure and leak-up rate.
Learn moreDecontamination
Remove hazardous process residues from chambers, lines and pumps, with a written statement.
Learn moreTest and certification
Run the refurbished tool on a test process and report the measured results for a Certified grade.
Learn moreUpgrades for legacy semiconductor tools
Retrofit older tools with new controls, light sources, pumps, wafer sizes or endpoint detection.
Control system retrofit
Replace obsolete controllers, PCs and storage on older tools, keeping recipes and interlocks.
Learn moreWafer size conversion
Convert a tool between 100, 150 and 200 mm wafers, or fit carriers for pieces and small wafers.
Learn moreDry pump conversion
Replace oil-sealed roughing pumps with dry pumps sized to the process and its chemistry.
Learn moreEndpoint detection
Add optical emission or laser endpoint detection to older plasma etchers to stop on the film.
Learn moreMaintenance and service for older semiconductor tools
Keep older process tools running with planned maintenance, repair, calibration and parts.
Preventive maintenance
Scheduled service on wear parts, with intervals set by how you actually use each tool.
Learn moreRepair and troubleshooting
Fault diagnosis and repair for down tools, with a root-cause report when the tool is running again.
Learn moreSpare parts
Tested used, refurbished and equivalent parts for older tools, and a spares list for your site.
Learn moreCalibration
Checks and adjustment of flow, pressure, temperature, RF power and exposure intensity, with recorded values.
Learn moreService contracts
An annual agreement for preventive visits, calibration, remote help and spares, priced per tool.
Learn moreRemote support
Phone, video and supervised remote sessions that help your staff solve faults without a site visit.
Learn moreSemiconductor equipment installation, relocation and start-up
Moving a process tool from one cleanroom to another, and getting it running at the new site.
De-installation and crating
Safe shutdown, documented disconnection and export crating of process tools.
Learn moreRigging and transport
Route planning, specialist rigging and monitored transport from one cleanroom to the next.
Learn moreHook-up and facilities
Facility specifications for each tool, checks on the building side and the tool-side connections.
Learn moreCommissioning and acceptance
Staged start-up, subsystem checks and agreed acceptance tests before handover.
Learn moreOperator training
Hands-on training and written procedures for the people who will run and look after the tool.
Learn moreFrom enquiry to a tool that runs
Tell us the process
You share the process, wafer size and facilities; we shortlist tools that fit.
Inspection and report
Where it is safe to do so, we power up each tool and check it against its original specification.
Refurbishment
We replace worn parts, clean the chamber and recalibrate to the scope you approved.
Crating and installation
We crate the tool for export, ship it and hook it up at your loading dock.
Questions and answers
Do you service tools that you did not sell?
Yes. Service work is often on tools the owner bought elsewhere or has run for years. We ask for the model, configuration, service history and a description of the fault or goal before we scope the job.
Should we refurbish or upgrade an older tool?
Refurbishment restores the tool to its original specification; an upgrade changes what it can do or replaces a part that is no longer supported, such as an obsolete controller. If the tool still fits your process, refurbishment is usually enough. If your process has moved on, or spare parts are running out, an upgrade is worth scoping alongside it.
How do you price service work?
We quote per job after a survey on site or from photos and logs. The quote lists the scope, the parts we expect to replace and what happens if we find more once the tool is open.
Not sure which service you need?
Tell us the tool, the process and the state it is in. We recommend the smallest scope that gets it running.