KLA-Tencor P-series stylus profiler

Where the P-series fits

The Tencor P-series is the bench-top stylus profiler line that started at Tencor Instruments in the late 1980s and continued under KLA-Tencor and KLA. Used P-series profilers are common because so many were installed across research, MEMS and compound semiconductor labs. They answer the everyday questions of a cleanroom: how deep did the etch go, how thick is the resist or metal step, how rough is the surface, and how much has the wafer bowed after deposition.

Different generations are on the market. Older P-10, P-11 and P-15 class tools are still running in many labs; the P-16 and P-16+ added a newer sensor and software; the P-6 is the compact 150 mm model, and the P-7 and P-17 are the current bench-top versions. Sample size, scan length and vertical range differ by model, so we confirm them against the nameplate and installed options, not just the model badge.

What we inspect on a used P-series profiler

• Sensor and stylus. We scan a step height standard and check noise floor, linearity and repeatability. The stylus tip is checked under the microscope for chips and contamination.
• Stylus force calibration. We run the force calibration routine and confirm it is stable over the force range.
• Scan stage. Long scans show stage straightness and any drag or stiction in the drive. Bow measurements are only as good as the stage, so this matters for stress work.
• X-Y and theta stage. Travel, homing and vacuum hold-down across the full sample area.
• Optics and camera. Focus, illumination and camera image quality, which affect pattern recognition and placing the scan.
• Isolation. The vibration isolation table or enclosure, because a profiler on a poor table measures the building as much as the sample.
• Controller and PC. Software version, licensed options, recipe storage and the condition of the hard drive.

Refurbishment and repair scope

A typical refurbishment replaces the stylus, cleans and adjusts the scan stage, replaces worn cables and fans, and recalibrates step height and force against standards. Where the PC is near end of life, we image the drive first and move to new hardware if the software and interface cards allow. Sensor faults are the expensive repair on this platform: we diagnose them before quoting and tell you whether the head can be repaired or needs replacing from stock. Faults during use are handled through repair and troubleshooting.

Upgrades and spare parts

The upgrades that add the most to a research profiler are software options: stress measurement, 3D mapping and pattern recognition for repeated sites. On older units, a new isolation table often improves results more than any software change. Styli, step height standards, stage parts, lamps and PCs are the usual spares; ageing electronics are the main long-term risk, which our post on keeping legacy tools running covers in more detail.

Facilities

• Single-phase mains power for the profiler and PC
• Vacuum for the sample chuck (house vacuum or a small pump, depending on model)
• Clean dry air for the isolation table, where it is pneumatic
• A low-vibration location away from pumps, doors and foot traffic
• Stable room temperature for repeatable long scans

Buying advice

Start with the largest sample you need to measure and whether you need wafer bow or stress. A 150 mm compact model is enough for most piece and 100 mm work; 200 mm stress mapping needs a larger stage and the stress option. Ask which options are licensed, not just installed, and which software version runs. A recent calibration on traceable standards tells you more about a used profiler than its age. If you also need film thickness or optical constants, compare profilers with the optical tools in our metrology range.