Logitech PM5 lapping and polishing system

Where the PM5 fits

Logitech, based in Scotland, has built precision lapping and polishing machines for decades, and the PM5 is one of its most common bench-top systems in university labs. A used Logitech PM5 suits a lab that needs to thin wafers or dies, prepare cross-sections, flatten samples before bonding or polish hard and brittle materials such as gallium arsenide, sapphire, glass and ceramics.

It is not a substitute for a CMP tool such as the Strasbaugh 6EC. The PM5 removes material with free abrasive on a rotating plate while the sample is held in a precision jig, which makes it well suited to bulk thinning and to samples of irregular shape. Labs often run both: the PM5 for thinning and preparation, a CMP polisher for device films, alongside the other tools in wet processing and CMP.

How the PM5 works

The machine drives a 300 mm plate at a variable speed, with slurry fed onto the plate. The sample is waxed or vacuum-mounted on the jig, and the jig rides on the plate under a controlled load. Changing from lapping to polishing means changing the plate and the abrasive, which is why labs keep several plates: cast iron for lapping, others for finer lapping and pads for polishing.

The quality of the result depends on two things the operator controls: plate flatness and jig set-up. The plate wears as it laps, and flatness is restored by adjusting where the jig or conditioning ring runs on the plate.

What we inspect

• Drive and controls. Plate speed stability, timer and control panel function.
• Plates. Flatness, groove condition on lapping plates, cracks or warping.
• Jig. Load mechanism, thickness gauge, vacuum or mounting face and the conditioning ring.
• Slurry feed. Cylinder or pump, agitation and dispense rate.
• Enclosure and drain. Splash guard, drain path and corrosion from slurry.

We lap a reference sample to check flatness and removal behaviour, and for a Certified grade we report the measured result.

Refurbishment and calibration

Refurbishment typically includes drive service, new seals and belts where worn, reconditioned plates, a cleaned and adjusted jig and a renewed slurry feed. We set plate speed and jig load against measured values as part of calibration and leave you a flatness record for each plate.

Because results depend on technique, we also offer operator training covering mounting, plate conditioning, abrasive sequences and cleaning between steps. Labs with several users can add the PM5 to a service contract so plates and jigs are checked on a fixed schedule.

Facilities

A bench-top tool with modest needs; we confirm them for your unit.

• Single-phase power, voltage depending on the unit
• Water supply for rinsing
• Drain or collection suited to abrasive slurry
• Bench space with room for plates, jigs and mounting equipment
• Local extraction if you use solvents for wax removal

Buying advice

Ask which plates, jigs and accessories are included; a PM5 with a precision jig and several plates is worth far more than a bare base unit. Check the plates for flatness and the jig for a working thickness gauge before you agree a price.