ICP or RIE: choosing a plasma etcher for a university cleanroom
A parallel-plate RIE covers most teaching and dielectric work. An ICP-RIE opens up deep, anisotropic and III-V etching. How to decide which to buy used.
Buying guides, process comparisons, maintenance checklists and export notes for people who choose and run semiconductor equipment.
A parallel-plate RIE covers most teaching and dielectric work. An ICP-RIE opens up deep, anisotropic and III-V etching. How to decide which to buy used.
As-is, Inspected, Refurbished, Certified or new. What each option actually includes, where the risk sits, and how to match it to your lab.
What a UV-LED conversion changes on a mask aligner, from wavelength and dose to uniformity and lamp-house cooling, and how to requalify your resists afterwards.
Lamp house, stage, alignment optics and mask holder sizes decide what an older aligner can still do. A checklist for your inspection visit.
SemiXperts refurbishes, upgrades, maintains and installs process tools for university cleanrooms, pilot lines and small fabs. What we do and how we work.