Process know-how
Ellipsometer or reflectometer: choosing a film thickness tool
Reflectometers measure routine films quickly and cheaply. Ellipsometers handle very thin films, unknown materials and stacks. How to choose for your lab.
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Process know-how
How the processes behind the tools work, from DRIE and ALD to LPCVD and lift-off, and which type of tool fits which job in a research cleanroom.
Process know-how
The Bosch process explained: deep reactive ion etching in practice
How the Bosch process alternates etch and passivation to cut deep, vertical features in silicon, what limits it, and what to check on a used DRIE tool.
Process know-how
Thermal vs plasma ALD: what a research lab needs
Thermal ALD gives the best conformality and the simplest tool. Plasma ALD adds lower temperatures and more materials. How to choose for a shared research lab.
Process know-how
PECVD vs LPCVD silicon nitride: which film for which job
Temperature, stress, hydrogen content and etch resistance separate PECVD and LPCVD nitride. How to choose the process, and the tool, for your device.
Process know-how
E-beam evaporation vs sputtering for lift-off metallisation
Why lift-off favours a directional e-beam evaporator, when sputtering still works, and what to check on a used tool before you rely on it for metal patterns.