Keeping older semiconductor tools running and making them better: preventive maintenance, dry pump and UV-LED conversions, and legacy controls.
Old controllers, discontinued boards and lost manuals retire most legacy tools. How to plan spares, backups and retrofits before a failure forces it.
When a dry pump conversion pays off on an etcher, CVD tool or evaporator, how to size the replacement and what changes in facilities and interlocks.
Daily, weekly, monthly and yearly checks that keep an RIE or ICP etcher stable, and the log entries that warn you before a run goes wrong.
What a UV-LED conversion changes on a mask aligner, from wavelength and dose to uniformity and lamp-house cooling, and how to requalify your resists afterwards.